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Preparation of ITO and IZO thin films by using Facing Target Sputtering(FTS)method
Preparation of ITO and IZO thin films by using Facing Target Sputtering(FTS)method
- 제목
- Preparation of ITO and IZO thin films by using Facing Target Sputtering(FTS)method
- 제목 (타언어)
- Preparation of ITO and IZO thin films by using Facing Target Sputtering(FTS)method
- 저자
- 김경환
- 발행일
- 2008-08-20
- 학회명
- ICMAP 2008
- 개최지
- Ramada jeju hotel, jeju, korea
- 개최국가
- 대한민국
- 학회 개최일
- 2008-08-18 ~ 2008-08-20