Utilizing liquid tin for fluorine gas removal and upcycling by-products: A sustainable approach

초록

Nitrogen trifluoride (NF3), a widely used gas in the semiconductor and display industry, has significant environmental implications because of its high radiative forcing properties and slow decomposition rate. The safe handling and recycling/upcycling of NF3 gas can play a crucial role in environmental protection and mitigating global warming. This study investigates the decomposition of NF3 and the characteristics of the fluorine compounds generated through its reaction with liquid tin, exploring the potential for upcycling these greenhouse gases. NF3 was passed through a reactor containing liquid tin to induce a reaction between NF3 and liquid tin, while the produced particulate matter was filtered out. The experimental results revealed distinct structural and compositional characteristics of three retrieved by-products formed from the reaction: tin ingot, powders from the interior of the reactor, and particulate matter captured on the filter. Notably, the particulate matter with a high SnF2 content coated on the filter exhibits appropriate antibacterial properties and cytotoxicity. The primary fluorine compound, SnF2, derived from the reaction between liquid tin and NF3, suggests potential applications as an antibacterial material. Thus, this study offers a new perspective on the reduction of fluorinated gases and the upcycling of fluorine compounds.

키워드