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The Effect of Post Annealing in Oxygen Ambienton Characteristics of Al-Doped ZnO Films for Film Bulk Acoustic Resonator(FBAR)
- 제목
- The Effect of Post Annealing in Oxygen Ambienton Characteristics of Al-Doped ZnO Films for Film Bulk Acoustic Resonator(FBAR)
- 저자
- 김종성
- 학회명
- 9th APCChE Congress and CHEMECA 2002
- 개최국가
- 뉴질랜드
- 학회 개최일
- 2002-09-30