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Fabracatioin of Sputtered Mo Gated Silicon Field Emitter Arrays by using the Condition of Silicon Dry Etch
Fabracatioin of Sputtered Mo Gated Silicon Field Emitter Arrays by using the Condition of Silicon Dry Etch
- 제목
- Fabracatioin of Sputtered Mo Gated Silicon Field Emitter Arrays by using the Condition of Silicon Dry Etch
- 제목 (타언어)
- Fabracatioin of Sputtered Mo Gated Silicon Field Emitter Arrays by using the Condition of Silicon Dry Etch
- 저자
- 조의식
- 발행일
- 2007-11-14
- 학회명
- 29th International Symposium on Dry Process
- 개최지
- Tokyo International Exchange Center, Tokyo
- 개최국가
- 일본
- 학회 개최일
- 2007-11-13 ~ 2007-11-14