상세 보기
Fabrication of Sputtered Mo Gated Silicon Field Emitter Arrays by using the Condition of Silicon Dry Etch
Fabrication of Sputtered Mo Gated Silicon Field Emitter Arrays by using the Condition of Silicon Dry Etch
- 제목
- Fabrication of Sputtered Mo Gated Silicon Field Emitter Arrays by using the Condition of Silicon Dry Etch
- 제목 (타언어)
- Fabrication of Sputtered Mo Gated Silicon Field Emitter Arrays by using the Condition of Silicon Dry Etch
- 저자
- 권상직
- 발행일
- 2007-11-14
- 학회명
- 2007 Dry Process International Symposium
- 개최지
- Tokyo, Japan
- 개최국가
- 일본
- 학회 개최일
- 2007-11-13 ~ 2007-11-14