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Self-annealing effect of ion implanted amorphous carbon films by MPCVD
Self-annealing effect of ion implanted amorphous carbon films by MPCVD
- 제목
- Self-annealing effect of ion implanted amorphous carbon films by MPCVD
- 제목 (타언어)
- Self-annealing effect of ion implanted amorphous carbon films by MPCVD
- 저자
- 조의식
- 발행일
- 2008-09-11
- 학회명
- 19th European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, and Nitrides
- 개최지
- Sitges, Spain
- 개최국가
- 스페인
- 학회 개최일
- 2008-09-07 ~ 2008-09-11