Electrochromic characterization of amorphous tungsten oxide films deposited on indium tin oxide and CVD-graphene electrodes by RF magnetron sputtering

초록

Electrochromism in amorphous tungsten oxide films, lasting and reversible color change to dark blue, is up to injection or withdrawal of electrons. Indium tin oxide (ITO) is widely used as the transparent electrodes for electrochromic devices. We sputtered a-WOx film on indium tin oxides (ITO) coated flexible polyelthylene terephthalate (PET) substrate. The sheet resistance of ITO/PET is 200 Ohm/sq. To determine optimum condition, we deposited the films under various partial pressures of oxygen and exposure time for adjusting the thickness of the film at room temperature. Optical properties were checked with optical transmittance and Raman spectroscopy of WO3 film depending on various O-2 pressure. We verified the best condition when WO3 film was deposited on ITO/PET substrate with 2% O-2 partial pressure and the EC property for graphene /PET application.

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