Performance Improvement of 1T DRAM by Raised Source and Drain Engineering

초록

In this work, a double-gate (DG) metal-oxide-semiconductor field-effect transistor (MOSFET) with raised source and drain (RSD) regions is utilized for application of one-transistor (1T) dynamic random access memory (DRAM) through series of validation by technology computer-aided design (TCAD) device simulation. The engineered device shows less short-channel effects (SCEs) and unwanted interband tunneling compared with the usual DG MOSFETs. As a 1T DRAM device, it demonstrates longer retention time (Tret) and larger sensing margin (SM). The designed 1T DRAM achieves Tret ~330 and ~200 ms at 27 °C and 85 °C, respectively, at 50-nm channel length. Also, the device shows higher current ratio and consumes low power (84.7 nW for write ``1'') and energy (2.16 x 10⁻¹⁵ J for read ``1'' and 1.5 x 10⁻¹⁷ J for read ``0'' operations). Furthermore, it is revealed that low-κ spacer has an effect of increasing Tret in the device. IEEE

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