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Properties of AIZTO(Al-In-Sn-ZnO) thin film prepared by facing target sputtering system
Properties of AIZTO(Al-In-Sn-ZnO) thin film prepared by facing target sputtering system
- 제목
- Properties of AIZTO(Al-In-Sn-ZnO) thin film prepared by facing target sputtering system
- 제목 (타언어)
- Properties of AIZTO(Al-In-Sn-ZnO) thin film prepared by facing target sputtering system
- 저자
- 최형욱
- 발행일
- 2009-07-24
- 학회명
- The 13th Japan-Korea International Syposium on Advanced Display Materials and Devices
- 개최지
- 히로시마, 일본
- 개최국가
- 일본
- 학회 개최일
- 2009-07-23 ~ 2009-07-24