Preparation of Al Doped ZnO/Ag/Al Doped ZnO Multilayer Thin Films by using Facing Targets Sputtering

Preparation of Al Doped ZnO/Ag/Al Doped ZnO Multilayer Thin Films by using Facing Targets Sputtering
제목
Preparation of Al Doped ZnO/Ag/Al Doped ZnO Multilayer Thin Films by using Facing Targets Sputtering
제목 (타언어)
Preparation of Al Doped ZnO/Ag/Al Doped ZnO Multilayer Thin Films by using Facing Targets Sputtering
저자
최형욱
발행일
2007-12-07
학회명
2007 The 14th International Display Workshops
개최지
삿포르
개최국가
일본
학회 개최일
2007-12-05 ~ 2007-12-07