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Mechanism for nitrogen-originated negative bias temperature instability (NBTI) in Si oxynitride
Mechanism for nitrogen-originated negative bias temperature instability (NBTI) in Si oxynitride
- 제목
- Mechanism for nitrogen-originated negative bias temperature instability (NBTI) in Si oxynitride
- 제목 (타언어)
- Mechanism for nitrogen-originated negative bias temperature instability (NBTI) in Si oxynitride
- 저자
- 이은철
- 발행일
- 2007-12-14
- 학회명
- The 5th International Conference on Advanced Materials and Devices
- 개최지
- jeju, Korea
- 개최국가
- 대한민국
- 학회 개최일
- 2007-12-12 ~ 2007-12-14