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Effects of Amorphous Si underlayer to CoCrTa/Si thin film prepared by Facing Targets sputtering system
- 제목
- Effects of Amorphous Si underlayer to CoCrTa/Si thin film prepared by Facing Targets sputtering system
- 저자
- 김경환
- 학회명
- The International Conference on Electrical Engineering 2002
- 개최국가
- 대한민국
- 학회 개최일
- 2002-07-07