Anti-adhesion surface treatments for mold for high-resolution unconventional lithography

Anti-adhesion surface treatments for mold for high-resolution unconventional lithography
제목
Anti-adhesion surface treatments for mold for high-resolution unconventional lithography
제목 (타언어)
Anti-adhesion surface treatments for mold for high-resolution unconventional lithography
저자
이내윤
발행일
2007-10-05
학회명
한국바이오칩학회 2007 추계학술대회
개최지
경원대학교
개최국가
대한민국
학회 개최일
2007-10-04 ~ 2007-10-05