Charateristic of IZTO thin film deposited at room temperature by the Hetero-Target sputtering system

Charateristic of IZTO thin film deposited at room temperature by the Hetero-Target sputtering system
제목
Charateristic of IZTO thin film deposited at room temperature by the Hetero-Target sputtering system
제목 (타언어)
Charateristic of IZTO thin film deposited at room temperature by the Hetero-Target sputtering system
저자
김경환
발행일
2008-10-31
학회명
VASSCAA-4
개최지
Mastue, Japan
개최국가
일본
학회 개최일
2008-10-28 ~ 2008-10-31