Effects of O2/Ar ratio on ITO Thin Film Deposited on Polycarbonate Substrate using In-Line DC Magnetron Sputtering

Effects of O2/Ar ratio on ITO Thin Film Deposited on Polycarbonate Substrate using In-Line DC Magnetron Sputtering
제목
Effects of O2/Ar ratio on ITO Thin Film Deposited on Polycarbonate Substrate using In-Line DC Magnetron Sputtering
제목 (타언어)
Effects of O2/Ar ratio on ITO Thin Film Deposited on Polycarbonate Substrate using In-Line DC Magnetron Sputtering
저자
권상직
발행일
2009-11-19
학회명
International Workshop on Flexible & Printable Electronics 2009
개최지
무주리조트
개최국가
대한민국
학회 개최일
2009-11-18 ~ 2009-11-19