Preparation of thin film electrode for display by using facing targets sputtering method

Preparation of thin film electrode for display by using facing targets sputtering method
제목
Preparation of thin film electrode for display by using facing targets sputtering method
제목 (타언어)
Preparation of thin film electrode for display by using facing targets sputtering method
저자
박상준
발행일
2006-11-30
학회명
International Symposium on Dry Process 2006
개최지
일본 나고야
개최국가
일본
학회 개최일
2006-11-29 ~ 2006-11-30