AlGaN/GaN heterojunction hydrogen sensor using ZnO-nanoparticles/Pd dual catalyst layer

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초록

ZnO-nanoparticles (NPs) were investigated for improving the response characteristics of a Pd-functionalized AlGaN/GaN heterojunction-based hydrogen gas sensor. The ZnO-NPs of diameter ∼10 nm were dispersed in a co-solvent of chloroform/ethanol (chloroform 75 %, v/v), which was found to be an optimal solution for uniform dispersion, and spin coated on the surface of the fabricated Pd/AlGaN/GaN hydrogen sensor. The ZnO-NP synthesis and dispersion methods were optimized carefully before being applied to sensor fabrication. It was observed that the addition of ZnO-NPs to the Pd catalyst enhanced the hydrogen absorption so that the response of the hydrogen sensor was improved. Compared with the single Pd catalyst layer, the ZnO-NPs/Pd double layer exhibited superior response characteristics—a response of ∼210 % and response time of ∼2 s were achieved at 200 °C with a bias voltage of 3 V. © 2020 Elsevier B.V.

키워드

AlGaN/GaN heterojunction; Hydrogen sensor; Nanoparticle synthesis; Pd catalyst; ZnO nanoparticle; Aluminum gallium nitride; Catalyst supports; Chemical sensors; Chlorine compounds; Dispersions; Gallium nitride; Heterojunctions; Hydrogen; II-VI semiconductors; III-V semiconductors; Metal nanoparticles; Nanocatalysts; Organic solvents; Oxide minerals; Palladium; Palladium compounds; Zinc oxide; AlGaN/GaN heterojunction; Dispersion methods; Hydrogen absorption; Hydrogen gas sensors; Nanoparticle (NPs); Response characteristic; Sensor fabrication; Uniform dispersions; ZnO nanoparticles
제목
AlGaN/GaN heterojunction hydrogen sensor using ZnO-nanoparticles/Pd dual catalyst layer
저자
Choi, J.-H.; Park, T.; Hur, J.; Cha, H.-Y.
DOI
10.1016/j.snb.2020.128946
발행일
2020-12
유형
Article
저널명
Sensors and Actuators, B: Chemical
권
325