Preparation of Hexagonal SrMnO3 High-Quality Target for Magnetron Sputtering

초록

In recent years, the optical behavior of complex oxides are being increasingly used in light-harvesting applications. Perovskites are promising candidates for photovoltaic, photocatalytic, and optoelectric applications because of tunable band gaps and other unique properties such as fer-roelectricity To study the optical behavior of ferromagnetic-ferroelectric oxides, SrMnO3 (SMO3) targets intended for use in magnetron sputtering were prepared using SrCO3 (99.99%) and Mn2O3 (99.99%) powders by a two-step solid reaction method. Experiments were performed at various temperatures to determine the optimum calcination temperature of the SMO3 powder (1000 °C) and optimum sintering temperature of the prepared target (1300 °C), in an effort to optimize the preparation process of the target at the laboratory scale and reduce the cost of the target by more than 20-fold. Samples of the ground powder were calcined at 800, 1000, 1200, and 1300 °C for 10 h, and the resultant targets were pressed into 1 -in molds after grinding and subsequently sintered at the same temperatures at which the corresponding powders were calcined, i.e., at 800, 1000, 1200, and 1300 °Cfor 48 h. The microcrystalline state of the powders was observed by scanning electron microscopy. The prepared targets were analyzed by X-ray diffraction, and the results were compared with the powder diffraction file card of hexagonal SMO3 to determine the optimum calcination temperature and sintering temperature of the powder formulation. Finally, the Vickers hardness values of the targets were measured, and the optimum target preparation process was determined.