Properties of the ITO film prepared by facing targets sputtering system at room temperature

Properties of the ITO film prepared by facing targets sputtering system at room temperature
제목
Properties of the ITO film prepared by facing targets sputtering system at room temperature
제목 (타언어)
Properties of the ITO film prepared by facing targets sputtering system at room temperature
저자
박상준
발행일
2006-04-26
학회명
8th International Conference on Advanced Surface Engineering
개최지
일본 동경
개최국가
일본
학회 개최일
2006-04-25 ~ 2006-04-26