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Mechanism for nitrogen-enhanced negative bias temperature instability (NBTI) in state-of-the-art MOSFETs with ultrathin Si oxynitride gate dielectrics
Mechanism for nitrogen-enhanced negative bias temperature instability (NBTI) in state-of-the-art MOSFETs with ultrathin Si oxynitride gate dielectrics
- 제목
- Mechanism for nitrogen-enhanced negative bias temperature instability (NBTI) in state-of-the-art MOSFETs with ultrathin Si oxynitride gate dielectrics
- 제목 (타언어)
- Mechanism for nitrogen-enhanced negative bias temperature instability (NBTI) in state-of-the-art MOSFETs with ultrathin Si oxynitride gate dielectrics
- 저자
- 이은철
- 발행일
- 2007-11-05
- 학회명
- 한국바이오칩학회 2007 추계학술대회
- 개최지
- 경원대학교
- 개최국가
- 대한민국
- 학회 개최일
- 2007-10-05 ~ 2007-11-05