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Self-annealing effect of ion implanted amorphous carbon films by MPCVD
Self-annealing effect of ion implanted amorphous carbon films by MPCVD
- 제목
- Self-annealing effect of ion implanted amorphous carbon films by MPCVD
- 제목 (타언어)
- Self-annealing effect of ion implanted amorphous carbon films by MPCVD
- 저자
- 권상직
- 발행일
- 2008-09-11
- 학회명
- The 19th European Conference on Diamond, Diamond-Like Meterials, Carbon Nanotubes and Nitrides
- 개최지
- SITGES, SPAIN
- 개최국가
- 스페인
- 학회 개최일
- 2008-09-07 ~ 2008-09-11