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Preparation of ITO thin film on flexible polymer substrate by using facing targets sputtering method
Preparation of ITO thin film on flexible polymer substrate by using facing targets sputtering method
- 제목
- Preparation of ITO thin film on flexible polymer substrate by using facing targets sputtering method
- 제목 (타언어)
- Preparation of ITO thin film on flexible polymer substrate by using facing targets sputtering method
- 저자
- 김경환
- 발행일
- 2006-10-21
- 학회명
- The 6th Korea-Japan Symposium on Plasma and Thin Film Technology
- 개최지
- 해운대그랜드호텔,부산
- 개최국가
- 대한민국
- 학회 개최일
- 2006-10-20 ~ 2006-10-21