Properties of AZO/Ag/AZO Multilayer Thin Film Deposited on Polyethersulfone Substrate

Citations

SCOPUS

35

초록

The AZO/Ag/AZO multilayer films were deposited on polyethersulfone (PES) substrate by using facing target sputtering methods at room temperature. The AZO/Ag/AZO multilayer films with polymer substrate had advantages, such as low sheet resistance, high optical transmittance in visible range and stable mechanical properties. From the results, the AZO/Ag/AZO multilayer films (50/12/50 nm) demonstrated a sheet resistance of 11 Ω/□ and average transmittance of 87% in visible range (wavelength of 380-770 nm). Moreover, the multilayer showed stable mechanical properties compared to the single-layered AZO sample during the bending test due to the existence of the ductile Ag metal layer. © 2013 KIEEME. All rights reserved.

키워드

AZO/Ag/AZOFacing target sputteringMultilayerPolyethersulfoneAZO/Ag/AZOFacing target sputteringMetal layerMulti-layer thin filmPolyethersulfonesPolymer substrateRoom temperatureVisible rangeDepositsEthersFacingsMechanical propertiesMultilayer filmsMultilayersSheet resistanceFilm preparation
제목
Properties of AZO/Ag/AZO Multilayer Thin Film Deposited on Polyethersulfone Substrate
저자
Jung, Y.S.Park, Y.S.Lee, W.-J.Kim, K.H.
DOI
10.4313/TEEM.2013.14.1.9
발행일
2013-02
유형
Article
저널명
Transactions on Electrical and Electronic Materials
14
1
페이지
9 ~ 11