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Properties of AZO/Ag/AZO Multilayer Thin Film Deposited on Polyethersulfone Substrate
- Jung, Y.S.;
- Park, Y.S.;
- Lee, W.-J.;
- Kim, K.H.
Citations
SCOPUS
35초록
The AZO/Ag/AZO multilayer films were deposited on polyethersulfone (PES) substrate by using facing target sputtering methods at room temperature. The AZO/Ag/AZO multilayer films with polymer substrate had advantages, such as low sheet resistance, high optical transmittance in visible range and stable mechanical properties. From the results, the AZO/Ag/AZO multilayer films (50/12/50 nm) demonstrated a sheet resistance of 11 Ω/□ and average transmittance of 87% in visible range (wavelength of 380-770 nm). Moreover, the multilayer showed stable mechanical properties compared to the single-layered AZO sample during the bending test due to the existence of the ductile Ag metal layer. © 2013 KIEEME. All rights reserved.
키워드
AZO/Ag/AZO; Facing target sputtering; Multilayer; Polyethersulfone; AZO/Ag/AZO; Facing target sputtering; Metal layer; Multi-layer thin film; Polyethersulfones; Polymer substrate; Room temperature; Visible range; Deposits; Ethers; Facings; Mechanical properties; Multilayer films; Multilayers; Sheet resistance; Film preparation
- 제목
- Properties of AZO/Ag/AZO Multilayer Thin Film Deposited on Polyethersulfone Substrate
- 저자
- Jung, Y.S.; Park, Y.S.; Lee, W.-J.; Kim, K.H.
- 발행일
- 2013-02
- 유형
- Article
- 권
- 14
- 호
- 1
- 페이지
- 9 ~ 11