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Properties of ITO(Indium Tin Oxide) Thin Film by Magnetron Sputtering Using DC and Pulse Modes

제목
Properties of ITO(Indium Tin Oxide) Thin Film by Magnetron Sputtering Using DC and Pulse Modes
저자
권상직
학회명
IMID'02
개최국가
대한민국
학회 개최일
2002-08-21

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