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Electrical and optical properties of In-Zn-Sn-O thin film deposited on polymer substrates through a Hetero-Target Sputtering System
Electrical and optical properties of In-Zn-Sn-O thin film deposited on polymer substrates through a Hetero-Target Sputtering System
- 제목
- Electrical and optical properties of In-Zn-Sn-O thin film deposited on polymer substrates through a Hetero-Target Sputtering System
- 제목 (타언어)
- Electrical and optical properties of In-Zn-Sn-O thin film deposited on polymer substrates through a Hetero-Target Sputtering System
- 저자
- 김경환
- 발행일
- 2009-09-25
- 학회명
- Seventh Asian-European International Conference on Plasma Surface Engineering
- 개최지
- BEXCO Convention Center, Busan
- 개최국가
- 대한민국
- 학회 개최일
- 2009-09-20 ~ 2009-09-25