The study of correlation between electrical conductivity of solution-processed ZnO film and UV irradiation

  • Hong, J.; 
  • Lin, H.-E.; 
  • Katsumata, K.-I.; 
  • Matsushita, N.
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초록

This study investigated the correlation between the electrical conductivity of solution-processed ZnO film and UV irradiation. As-deposited ZnO film without UV irradiation was found to have a high resistivity, while the resistivity of UV irradiated ZnO film drastically decreased, owing to photo-induced doping under UV irradiation. The effect of UV intensity on the decomposition rate of organic substance indicated proportional relation. In addition, a transparent electric circuit was fabricated by UV patterning. © 2020 Elsevier Ltd

키워드

Conductivity; Spin-spray; UV; UV patterning; ZnO; Electric conductivity; II-VI semiconductors; Metallic films; Oxide minerals; Semiconductor doping; Zinc oxide; Decomposition rate; Electrical conductivity; High resistivity; Organic substances; Proportional relation; Solution-processed; UV irradiation; Without UV irradiations; Irradiation
제목
The study of correlation between electrical conductivity of solution-processed ZnO film and UV irradiation
저자
Hong, J.; Lin, H.-E.; Katsumata, K.-I.; Matsushita, N.
DOI
10.1016/j.mssp.2020.105266
발행일
2020-12
유형
Article
저널명
Materials Science in Semiconductor Processing
권
120