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Study on the discharge properties of facing targets sputtering system with target to target distance and preparation of ITO thin films with targets distance
Study on the discharge properties of facing targets sputtering system with target to target distance and preparation of ITO thin films with targets distance
- 제목
- Study on the discharge properties of facing targets sputtering system with target to target distance and preparation of ITO thin films with targets distance
- 제목 (타언어)
- Study on the discharge properties of facing targets sputtering system with target to target distance and preparation of ITO thin films with targets distance
- 저자
- 김경환
- 발행일
- 2008-06-19
- 학회명
- Interfinish
- 개최지
- Grand Hotel Haeundae, Busan, Korea
- 개최국가
- 대한민국
- 학회 개최일
- 2008-06-16 ~ 2008-06-19