상세 보기
자료 필터
자료유형
발행연도
2021 ~ 2024
2021 2024
키워드
언어
전체 12건 중 11번부터 12번까지의 결과를 표시합니다.
2021
Article
Influence of the gas pressure in a Torr regime capacitively coupled plasma deposition reactor
- 2021-06
- Plasma Sources Science and Technology
- IOP PUBLISHING LTD
Article
Analysis of thermal diffusion effects observed in a capacitively coupled plasma deposition reactor with non-isothermal walls
- 2021-05
- Vacuum
- PERGAMON-ELSEVIER SCIENCE LTD